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The following handle holds various files of this Leiden University dissertation:

http://hdl.handle.net/1887/67129

Author: Zhong, Z.

(2)

Reconstruction Methods for Combined

HAADF-STEM and EDS Tomography

Proefschrift

ter verkrijging van

de graad van Doctor aan de Universiteit Leiden,

op gezag van Rector Magnificus prof. mr. C.J.J.M. Stolker,

volgens besluit van het College voor Promoties

te verdedigen op maandag 10 december 2018

klokke 11:15 uur

door

Zhichao Zhong

(3)

Eerste Promotor: Prof. dr. K.J. Batenburg (Universiteit Leiden) Tweede Promotor: Prof. dr. B. Rieger (TU Delft)

Samenstelling van de promotiecommissie:

Voorzitter: Prof. dr. A.W. van der Vaart (Universiteit Leiden) Secretaris: Prof. dr. S.J. Edixhoven (Universiteit Leiden) Overige leden: Prof. dr. S. Bals (Universiteit Antwerpen)

(4)

Reconstruction Methods for

Combined HAADF-STEM and EDS

Tomography

(5)

The research in this thesis is partly financed by the Netherlands Organisation for Scientific Research (NWO), research programme “Automated multi-modal tomog-raphy for sub-22nm IC nodes”, project number 13314. The research was carried out at the Centrum Wiskunde & Informatica (CWI), Amsterdam, the Netherlands. The photo on the cover was taken by Xinyi Zhao in Beijing. The clear but colorless view above water represents HAADF-STEM imaging, while the colorful but fuzzy reflection in the water represents EDS imaging.

© 2018 Zhichao Zhong

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