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Pulse shape influence on the atmospheric barrier discharge

Citation for published version (APA):

Martens, T., Bogaerts, A., & Dijk, van, J. (2010). Pulse shape influence on the atmospheric barrier discharge. Applied Physics Letters, 96(13), 131503-1/3. [131503]. https://doi.org/10.1063/1.3315881

DOI:

10.1063/1.3315881 Document status and date: Published: 01/01/2010

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Pulse shape influence on the atmospheric barrier discharge

T. Martens,1,a兲A. Bogaerts,1and J. van Dijk2

1Department of Chemistry, University of Antwerp, Universiteitsplein 1 B-2610 Antwerp, Belgium

2Department of Applied Physics, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands 共Received 4 November 2009; accepted 4 January 2010; published online 31 March 2010兲 In this letter we compare the effect of a radio-frequency sine, a low frequency sine, a rectangular and a pulsed dc voltage profile on the calculated electron production and power consumption in the dielectric barrier discharge. We also demonstrate using calculated potential distribution profiles of high time and space resolution how the pulsed dc discharge generates a secondary discharge pulse by deactivating the power supply. © 2010 American Institute of Physics.关doi:10.1063/1.3315881兴

The shape of the applied voltage profile is a crucial fac-tor in generating cold atmospheric pressure plasmas.1In the present letter we first compare four typical applied voltage profiles and investigate which has the best performance con-cerning electron production and power consumption. In or-der to obtain a better unor-derstanding of the synergy between the power applied to the electrodes and the energy stored on the surfaces of the dielectric barriers we subsequently study the best performing setup in detail using calculated potential distributions of high time and space resolution.

For the investigation of the atmospheric pressure dielec-tric barrier discharges 共DBDs兲 we use a two-dimensional fluid model. The model is part of the Plasimo modeling framework2 and is based on continuity equations for mass, momentum and electron energy, which are numerically solved coupled to the Poisson equation for the electric field. Details on the physical descriptions and the numerical tech-niques that are being used can be found elsewhere.3

The experimental setup under study is a DBD with both electrodes covered with an alumina dielectric 共⑀r= 9兲 of 1

mm thickness. The spacing between the dielectric surfaces is 5 mm and on the top electrode a sinusoidal voltage is applied while the bottom electrode is grounded. The operating gas is atmospheric pressure helium with 100 ppm of nitrogen im-purity and it is described using nine different species and 18 different chemical reactions, the details of which can be found elsewhere.4

The validity of our model for this setup has previously been assessed,5 where an almost perfect agreement with the results of Luo et al.6 concerning the discharge current and gap voltage characteristics was obtained together with agree-ment of the spatial evolution of the discharge in time.

In order to obtain a better insight in the electron genera-tion and power consumpgenera-tion costs of different types of ap-plied voltage profiles, four distinct setups were chosen which all interact very differently with the deposited charge on the dielectrics. Figure 1 illustrates the applied voltage and the calculated gap voltage and current density of the four voltage profiles. All setups use a 4 kV peak-to-peak voltage. Setup 1 is a radio-frequency 共rf兲 discharge operating at 13.56 MHz, setup 2 a sinusoidal applied voltage at 10 kHz, setup 3 a rectangular voltage at 10 kHz and setup 4 is a pulsed dc discharge operating at 10 kHz. For the rectangular voltage

and the pulsed dc discharge rise times of 50 ns are used. This value is based on the setups of Liu, Laroussi and Lu.7–9Note that the difference between setups 3 and 4 is that the rectan-gular voltage has both positive and negative values, whereas the pulsed dc discharge has only a positive applied voltage. The rf setup共1兲 produces a very powerful discharge with

a maximum current density of about 300 mA/cm2. The

quenching effect of the charges accumulated on the dielec-trics is very limited for this profile, because at such a high frequency the charged species are too much trapped in the discharge to quickly compensate the electric field before the polarity on the powered electrode has changed. As a conse-quence an almost sinusoidal profile is obtained for the dis-charge current which is slightly more than one eighth of a period out of phase with the applied voltage.

The 10 kHz sinusoidal voltage 共2兲 is the most typical profile for this kind of setup. It can be seen in Fig.1that the gap voltage increases until a value of 1.5 kV is reached and then gas breakdown occurs, whereafter the discharge is quickly quenched again due to the accumulation of charges on the dielectrics. This creates a self-sustained pulsed dis-charge system, although powered by a continuous sinus,

a兲Author to whom correspondence should be addressed. Electronic mail:

tom.martens@ua.ac.be. -400 -200 0 200 400 -3 -2 -10 1 2 3 -3 -2 -10 1 2 3 -3 -2 -10 1 2 3 -200 -100 0 100 200 -6 -4 -20 2 4 6 -200 -100 0 100 200 0 T/4 T/2 3T/4 T -6 -4 -20 2 4 6 Current Density (mA/cm 2) Moment in period T Volta g e (kV) (4) (3) (2) (1) current density applied voltage gap voltage

FIG. 1. 共Color online兲 Current density, gap voltage, and applied voltage during one period of applied voltage. Setup共1兲 uses a rf voltage, 共2兲 a 10 kHz sinusoidal profile,共3兲 a rectangular voltage, and 共4兲 a pulsed dc profile.

APPLIED PHYSICS LETTERS 96, 131503共2010兲

0003-6951/2010/96共13兲/131503/3/$30.00 96, 131503-1 © 2010 American Institute of Physics

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which is low in power consumption because it is a short current pulse, with an amplitude 100 times smaller than for the rf discharge.10

Figure 1 demonstrates that generating a DBD plasma

with a rectangular voltage共3兲 or with a pulsed dc profile 共4兲 using frequencies of 10 kHz and peak-to-peak voltages of 4 kV generates the same plasma which exhibits a current pulse of 230 mA/cm2 right after a gap voltage of 3.4 kV is reached.

In order to assess the use of the different types of power supply an estimation for the power consumption is needed. The time averaged power dissipated in the discharge can be determined by 具Pdiss典=共兰TPdissdt兲/共兰Tdt兲 where T is the

length of one period and Pdissis the dissipated power deter-mined by Pdiss=共兰vol¯ ·E¯dV兲/共兰J voldV兲, which is an integra-tion over the volume of the product of plasma current density and electric field.

The calculated dissipated power of the 4 setups is plotted in Fig.2 together with the time and space averaged electron density, as well as the ratio of this electron density to the dissipated power in order to obtain an idea of electron pro-duction efficiency. Since the focus lies on the comparison between the setups and in order to show all information in one plot, all values in Fig. 2are normalized to their highest value. The electron density and the electron production effi-ciency are plotted to the linear axis on the left, while the dissipated power is plotted to the logarithmic axis on the right.

Figure 2 demonstrates that the rf discharge 共1兲 very clearly has the highest electron production, but requires an enormous amount of power. Due to this high power con-sumption, the rf discharge clearly has the lowest efficiency in the electron production. The other three setups all give rise to a discharge pulsed in nature, which can be seen in Fig. 1. Since the current in a pulsed discharge only flows for a lim-ited amount of time, also the power consumption is limlim-ited in time. As a consequence, the dissipated power of setups 2, 3, and 4 is almost three orders of magnitude lower than for setup 1, as is illustrated in Fig. 2.

Figure2also shows that the efficiency of the rectangular profiles共3兲 and 共4兲 is about four times higher than the sinu-soidal profile. This increased efficiency is obtained because the rectangular voltage共3兲 and the pulsed dc voltage 共4兲 are characterized by a change in the applied voltage on the elec-trodes during only 50 ns in half a period, which makes 100

ns in an entire period. A change of 4 kV during 50 ns pro-vides for a voltage growth rate of 8⫻1010 V s−1. This is about 300 times higher than the voltage growth rate at the point of breakdown when using a sinusoidal profile with an amplitude of 4 kV and a frequency of 10 kHz, i.e., 2.5 ⫻108 V s−1. Increasing the voltage growth rate in an atmo-spheric pressure DBD significantly increases the maximal current density and the space charge.11Therefore, the rectan-gular profile 共3兲 and the pulsed dc voltage 共4兲 provide for a much higher electron density than the sinusoidal voltage共2兲, as can be seen in Fig.2. Figure2 also demonstrates that the increased pulse strength requires a greater amount of power, but the increased demand of power remains limited because the discharge pulse lasts only for 150 ns, while for the sinu-soidal profile the discharge pulse lasts for 6.05 ␮s, which is about 40 times longer. Therefore, the increased voltage growth rate, which causes the discharge pulse to be stronger, in combination with the restricted pulse width, which causes the power consumption to be limited in time, are responsible for the superior efficiency of the rectangular voltage共3兲 and the pulsed dc voltage共4兲.

Figure2illustrates that the same results are obtained for the rectangular voltage共3兲 and the pulsed dc discharge 共4兲. It is logical that the same discharge is obtained when the same peak-to-peak voltage is used in a DBD, because as can be seen in Fig.1due to the charge accumulation on the dielec-trics, the same gap voltages are obtained. The real power consumption, however, will be different. Our model de-scribes only the dissipated power calculated from the equa-tions mentioned above. In order to obtain a full estimation of the power consumption, the supplied power needs to be cal-culated, i.e., Psupp=共兰volItotal·␾appdV兲/共兰voldV兲, where Itotalis the total electric current and ␾app is the applied potential.8 The total electric current comprises the discharge current as well as the external current flowing through the electrical circuit. Hence to calculate the latter, a description of the electrical circuit is needed and this is currently not yet present in our model. An estimation, however, can be made, because the total current and the discharge current will al-ways possess the same positive or negative sign.8 Figure 1

demonstrates that for both setup 3 and 4 one positive and one negative current pulse is obtained within one period. The most important difference between setup 3 and 4 is that the rectangular applied voltage 共3兲 has both positive and nega-tive values, whereas the pulsed dc discharge 共4兲 has only a positive applied voltage. Hence, for the rectangular voltage the supplied power in one period is determined by first a product of positive current and positive voltage and second by a product of negative current and negative voltage共setup 3, Fig.1兲. Therefore, it gives twice a positive contribution for

the supplied power. For the pulsed dc voltage, on the other hand, the supplied power in one period is determined by first a product of a positive current and a positive applied voltage and second by a product of a negative current and a positive voltage very quickly going to zero 共setup 4, Fig.1兲.

There-fore, it is first a positive value, but the second contribution is a small negative value, because the second discharge pulse is generated simply by turning the power source off. This small negative value provides for a so-called power recuperation effect,8 which will always make the power consumption of the pulsed dc discharge 共4兲 lower than for the rectangular voltage 共3兲. Therefore, of all studied profiles the pulsed dc 0 0.2 0.4 0.6 0.8 1 1.2 1 2 3 4 10 -5 10-4 10-3 10-2 10-1 100 101 Normalized density and density to power ratio Setup number Normalized dissi p ated p ower

normalized electron density normalized dissipated power e-production efficiency

FIG. 2. 共Color online兲 Normalized electron density, plasma power, and e−

production efficiency for the rf voltage共1兲, the 10 kHz sinusoidal voltage 共2兲, rectangular 共3兲, and pulsed dc voltage 共4兲.

131503-2 Martens, Bogaerts, and van Dijk Appl. Phys. Lett. 96, 131503共2010兲

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discharge will have the highest electron generation effi-ciency.

These efficiency calculations were also carried out for the electron energy density, because it is a combination of the energy used in order to generate electrons and the energy that is used to heat up the electrons. Using this parameter to assess the efficiency gave the same results.

The discharge pulse formations due to power activation and deactivation are studied by means of calculated potential distribution profiles of very high time and space resolution. The spatial emission behavior during these breakdown phe-nomena has been captured by Lu and Laroussi12 by using high speed imaging. The images showed that for the first breakdown the plasma emission starts in the bulk region, while for the second breakdown this emission starts at the momentary anode and then moves toward the cathode. In this letter we illustrate in Figs.3and4the calculated spatial profiles of the electric potential throughout the discharge, including the dielectrics and electrodes. The powered elec-trode is on the left and the grounded elecelec-trode is on the right. In the top frame of Fig. 3the transition is shown from zero gap voltage共⫺50 ns兲 evolving in six steps to maximum gap voltage 共0兲. At that point there is breakdown in the gas and 20 ns later the maximum current density is reached. This very quick uprise in both current and charge density causes the ionized gas to charge both dielectrics. The latter compen-sates the potential difference between the electrodes so that the gap voltage gradually becomes zero again. The compen-sation of applied voltages by the surface charges is shown in the bottom frame of Fig.3in six consecutive profiles. Here it can be seen that although the potential difference between the electrodes is 4 kV, the difference between the dielectric surfaces becomes negligible within 80 ns. Afterwards a po-tential of about 2.2 kV is upheld at both dielectrics during 50 ␮s. This is the potential energy that is stored on the sur-faces.

Indeed, the potential distribution illustrated by the last profile in Fig. 3, at 80 ns after the maximum gap voltage, barely changes for about 50 ␮s. Therefore, the difference with the first profile in Fig.4, at 50 ns before the minimum gap voltage, is negligible. Figure 4 clarifies the creation of the secondary pulse. When the applied potential is set to zero on the powered electrode, the decrease of this potential pushes the potential on the adjacent dielectric downwards. Since there are still charges stored on the dielectric, the po-tential is pushed far below zero until a value of⫺1.3 kV is reached. The other electrode is grounded and therefore not much happens on the adjacent dielectric on whose surface a potential of about 2 kV is upheld. This creates a very large gap voltage and a second breakdown occurs. Hence, this ex-plains the responsible mechanism for the secondary dis-charge pulse by deactivating the power supply. This mecha-nism can be followed in Fig.4where, similar as in Fig.3, the spatial potential profiles are plotted. The top frame shows the profiles from zero gap voltage 共⫺50 ns兲 to maximum gap voltage 共0兲 in six steps and the bottom frame illustrates the similar evolution from maximum gap voltage to a negligible gap voltage.

1M. G. Kong and X. T. Deng,IEEE Trans. Plasma Sci. 31, 7共2003兲. 2J. van Dijk, K. Peerenboom, M. Jimenez, D. Mihailova, and J. van der

Mullen,J. Phys. D 42, 194012共2009兲.

3G. Hagelaar, Ph.D. thesis, TU/e Eindhoven, 2000.

4T. Martens, A. Bogaerts, W. J. M. Brok, and J. v Dijk,Appl. Phys. Lett.

92, 041504共2008兲.

5T. Martens, W. J. M. Brok, J. van Dijk, and A. Bogaerts,J. Phys. D 42,

122002共2009兲.

6H. Luo, Z. Liang, B. Lv, X. Wang, Z. Guan, and L. Wang,Appl. Phys.

Lett. 91, 221504共2007兲.

7S. Liu and M. Neiger,J. Phys. D 34, 1632共2001兲.

8M. Laroussi, X. Lu, V. Kolobov, and R. Arslanbekov,J. Appl. Phys. 96,

3028共2004兲.

9X. Lu and M. Laroussi,J. Appl. Phys. 98, 023301共2005兲.

10G. E. Georghiou, A. P. Papadakis, R. Morrow, and A. C. Metaxas,J. Phys.

D 38, R303共2005兲.

11Y. B. Golubovskii, V. A. Maiorov, J. Behnke, and J. F. Behnke,J. Phys. D

36, 975共2003兲.

12X. P. Lu and M. Laroussi,J. Phys. D 39, 1127共2006兲.

0 1 2 3 4 -50 ns-40 ns -30 ns -20 ns -10 ns 0 0 1 2 3 4 0 1 2 3 4 5 6 7 Potential (kV) Position (mm) 0 10 ns 20 ns 30 ns 40 ns 80 ns

FIG. 3. 共Color online兲 Spatial profiles of the electric potential from the powered electrode on the left to the grounded electrode on the right. The vertical lines illustrate the surfaces of the dielectrics on the electrodes. The profiles are shown from 50 ns before the maximum gap voltage of 3.4 kV is reached共0兲, until 80 ns after the maximum gap voltage.

-1 0 1 2 3 4 -50 ns -40 ns -30 ns -20 ns -10 ns 0 -1 0 1 2 3 4 0 1 2 3 4 5 6 7 Potential (kV ) Position (mm) 0 10 ns 20 ns 30 ns 50 ns 80 ns

FIG. 4. 共Color online兲 Similar profiles as in Fig.3. The profiles are shown from 50 ns before the minimum gap voltage of⫺3.4 kV is reached 共0兲, until 80 ns after the minimum gap voltage. Note that the dashed line at⫺50 ns in the upper frame has exactly the same shape as the dashed line at 80 ns in the bottom frame of Fig.3, demonstrating that the potential distribution does not change for about 50 ␮s between the times of maximum and minimum gap voltage.

131503-3 Martens, Bogaerts, and van Dijk Appl. Phys. Lett. 96, 131503共2010兲

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