2012 International Workshop on EUV and Soft X-Ray Sources
www.euvlitho.com
64
S42
XUV Spectroscopy of the Interaction of Laser-produced Plasma
with Solid Surfaces
A S Kuznetsov
1, R Stuik
2, F Bijkerk
1,3, and A P Shevelko
4.
1
FOM Institute DIFFER – Dutch Institute for Fundamental Energy Research, Postbus
1207, 3430 BE Nieuwegein, The Netherlands (
www.differ.nl
)
2
Leiden Observatory, Universiteit Leiden, Postbus 9513,2300 RA Leiden, The
Netherlands
3
MESA+ Institute for Nanotechnology, University of Twente, Postbus 217, 7500 AE
Enschede, The Netherlands
4
P.N. Lebedev Physical Institute of the Russian Academy of Sciences, 117924
Moscow, Russia
Processes of interaction of dense, laser produced plasma (LPP) with solid surfaces represent an effective tool for controlled studies of various aspects of plasma-wall interaction, for instance simulating transient events in fusion reactors or EUV light sources and source exposed materials. A wide range of parameters can be explored by changing laser power, target and/or wall material, or target-wall distances. XUV and VUV radiation emitted during this interaction allows the usage of well-established in-situ diagnostics (X-ray and XUV spectroscopy) to quantify and control the interaction.
In the current work, intense XUV radiation was observed during interaction of low temperature LPPs and wall materials [1]. LPPs created on solid targets (CF2 and Al) by a
KrF laser were colliding with a solid wall placed on various distances from the target. The spectral and spatial structure of XUV radiation were studied by means of analyzing XUV spectra of F and Al ions.. At large plasma-wall distances three body recombination was identified as the dominating process responsible for ionic level population and radiation. The experiments demonstrated an effective way to create low temperature (Te~1-10 eV)
plasmas interacting with the solid surfaces and to study the root causes of materials damage.
[1] Kuznetsov A S et al Plasma Phys. Control Fusion 54 (2012) 085019
