PHYSICAL REVIE%'B VOLUME 41, NUMBER 7 1MARCH 1990
Proximity
effect
insuperconducting
bilayers and multilayers
J.
Aarts,J.
Meiresonne, H. Sprey, and W. MajKamerlingh Onnes Laboratorium, Leiden University, P.O. Box9506,2300RA Leiden, The Netherlands
P.
ZagwijnFI
-Institutefor
Atomic and Afolecular Physics, Kruislaan 407, 1098SJ
Amsterdam, The Netherlands(Received 19September 1989)
Measurements ofthe superconducting transition temperature T, of bilayers and multilayers of
Mo69Si3~/Mo47Si53 are presented. For the multilayers the results can be described in terms ofthe de Gennes-%'erthamer theory for the proximity effect, without adjustable parameters. For the bilayers it is shown that a depression ofT, occurs which can be described by the effects ofweak
localization in the same way as isalready known for single thin 61ms.
I.
INTRODUCTION~hen
a superconducting thin film is brought intocon-tact
with anormal metal, a loweringof
the superconduct-ing transition temperatureT„due
tothe proximity effect, is well known to occur. Nevertheless, detailed compar-isons between the theoretically expected and the experi-mentally observed changes inT,
upon varying the layer thickness are relatively scarce. This is the case for superconducting-normal metal bilayers as well as for multilayers. For bilayers, a problem is that the small thicknessof
the film may invoke other mechanisms forT,
suppression, which are then difficult to separate from the proximity effect. In multilayers this problem is avoided, but still effects other than the proximity effect often changeT„making
comparison with the theory difficult. For instance, in the multilayer system Nb-Zr, ' interface mixing results in a thin layerof
composition Nb05Zr05, which has a superconducting transition temperature higher than eitherof
the constituents Nb orZr.
In the system Mo-V, strain in the Mo and V layers develops below70
A and causes a discontinuous change in the be-haviorof
T,
.
Finally, in the archetypical system Nb-Cu,T,
decreases monotonously as a functionof
layer thick-ness, but foragreement between experiment and theory an intrinsic decreaseof
T,
of
the individual Nb layers with decreasing layer thickness has to be assumed. The aimof
the present work is twofold. First, we want to investi-gate the proximity effect in amultilayer system where no interfering effects occur. Second, we want tocompare the behaviorof
the multilayers with thatof
bilayers in order to identify additionalT,
-suppressing effects in the bi-layers. In this respect our experiments resemble recently reported workof
Missert and Beasly, who investigated the effectof
disorder on superconductivity in ultrathin multilayersof
amorphous Mo&—„Ge„alloys.
The system chosen forthe experiments consistsof
alternating layersof
two different superconductors. For the superconductors we used two different concentrations
of
the amorphous al-loy Mo„Si~„.
This choice has several advantages. One is that the alloys can be readily sputtered and the amor-phous structure avoids problems with changes orstrains inthe crystal structure. Then, Mo„Si~ —
„
forms a continu-ous solid solution betweenx
0
andx
0.
75 whileT,
changes linearly in at least the region betweenx
0.
45(T,
1.
5K)
andx
0.
70
(T,
7K),
s which allows for tuningof
theT,
of
the constituents. Also, the problemof
interface mixing is minimalized, since the
T,
of
the possi-ble interface layer lies in between theT,
of
the constitu-ents.II.
EXPERIMENTALAnumber
of
bilayers and multilayers were prepared by dcsputtering in an Ar atmosphere. Substrates used wereSi
and sapphire which were kept near room temperature during deposition. The target consistedof
aSi
wafer on which small piecesof
Mo metal were fixed. The two halvesof
the wafer contained different amountsof
Mo and alternate layersof
about equal thickness were sput-tered by moving a shutter in frontof
the wafer, thereby exposing one half or the other halfof
the target. The starting concentrations for the two constituent layers werex
0.
69
(calleds
layer,T„6.
26K)
andx
0.
47 (calledn layer,
T,
„1.
7K).
The ratioT,
„/T„was
therefore0.
27.
Thick single layers were sputtered before and dur-ing the preparationof
the series in order to measure the bulk propertiesof
the materials and to check on concen-tration changes. Multilayers consistedof
eleven single layers, the first and last being an n layer. Samples were characterized by electron microprobe analysis for the Mo andSi
concentrations. The thick layers, almost allof
the bilayers and someof
the multilayers were also character-ized by Rutherford backscattering. This gave estimates for the concentrations and thicknessesof
individual layers, which were used asa calibration for the thickness monitor inside the vacuum chamber. Forsome samples the thick-ness was also measured by meansof
a stylus. After cali-bration a thickness ratiod,
/d„of
1.
1 was found. One4740
BRIEF
REPORTS 41tures were determined by measuring the resistivity transi-tion with
a
four-point technique and using the10-90%
criterion. For these measurements, samples were pat-terned by photolithography and etching.III.
RESULTSAND DISCUSSIONFor
an analysisof
the results we use the de Gennes-Werthamer formalism, which is valid in the dirty limit and relates theT,
of a
bilayer to bulk parametersof
the constituents. The position-dependent order parameterd,
(x)
inthes
and nlayer can bewritten ash,
(x)
exp(~
ik,
x),
h„(x)
exp(~
k„x)
.(1)
The wave number
k, „satisfies
the expressionsIn(T,
/T„)
y(
i)
—
y(
—,'+
—,' g,k,
T,
JT,
),
ln(T, /T,
„)
y(
—,')
—
y(
—,'—
—,'g„k„T,
„/T,
),
where
T„„are
the transition temperaturesof
the constit-uents andT,
istransition temperatureof
the bilayer. The coherence length g,„
is given byxhks
68 T~(p;yg
(i
s,
n),
where p; and y; are the normal-state resistivities and linear specific-heat coefficients. The transition tempera-ture
T,
can be calculated by also taking accountof
the boundary conditions for i),(x).
These aredh(x)/dx
0
at the film-vacuum interface and
6/(NV)
(with N the densityof
states and V the attractive interaction between electrons) continuous at the bilayer interface. This leads tothe equation'
tan(k, d,
)
"
tanh(k„d„)
.
ps pn
(4)
Here, d,
„
is the thicknessof
the s, n layer in the bilayer.It
should be remembered that for a bilayer the conditiondh(x)/dx
0
is fulfilled at the vacuum interfaces, whereas foramultilayer, due to the symmetry, this condi-tion is also fulfilled in the middleof
ans
orn layer. This implies thatif
bilayer and multilayer are tohave the sameT„
the individual layer thicknesses in the multilayer have to be twice thoseof
the bilayer. The consequenceof
this will be investigated experimentally below. The parame-ters needed to calculate the change inT,
asafunctionof
a layer thickness from Eqs.(1)-(4)
areT,
„„p„,
„and
the product(py)„,
and these are all experimentally accessi-ble. In our case(py)„,
is calculated from measurementskg@
—
18,
212e
dT
(5)
The parameters derived from measurements on thick layers
of
the constituent materials are given in TableI.
The critical fields in these materials are high and the coherence lengths correspondingly low. The
—
dB,
2/dT for the high Mo concentration differed by about 5%for different samples and is 10% lower than the literature value. Again for different samples the—
dB,
2/dT for the low Mo concentration differed by more than15%.
The value in Table I is an average which is still about 20% lower than the literature value. The reason for this discrepancy was not found. TheT,
as calculated from these parameters and scaled onT„
is shown in Fig. 1bothfor bilayers
(TP')
and for multilayers(T,
")
and show a characteristic decrease around a thicknessof
a few times the coherence length. As a consequenceof
the symmetry argument mentioned above,T,
' lies aboveT,
".
The re-sultsof
the measurements are also given in Fig.1.
In caseof
the multilayers, the measurements follow the calculated curve down to about 150A, but below 150A the devia-tions become appreciable.To
make the difference in be-havior for bilayers and multilayers more clear, the values ofT,
'—
T,
",
again scaled onT„,
are plotted in Fig. 2. The calculation shows that this difference can be appre-ciable and should reach a maximumof
about0.
8 K around a thicknessof
150 A. The measurements, howev-er, do not show this behavior. Above 100A.theT, of
the bilayers is larger than theT,
of
the corresponding multi-layers, as expected, although the difference issmaller than calculated in Fig. 2. Below100
A, however, the difference even becomes inverted, an observation which is in agree-ment with those ofMissert and Beasly.In order to explain the apparent discrepancies between experiment and calculation, it should be noted that most samples are thin films. This is clearly so for all bilayers, but itisalso the case for the smallest multilayers. For in-stance the multilayer with d, 36A has a total thickness of
370
A..
Both experimentally and theoretically it is known that when superconducting films become thin (for disordered films: on the scaleof
the electron diffusion length) the effectsof
weak localization start to suppress the superconductivity. ''
Specifically, it was shownby Graybeal and Beasly' that in thin films of Mo79Ge2~ (an alloy very similar to Mo„Si& —
)
the bulk transition tem-peratureT,
odecreases with decreasing film thickness in amanner which can be described by a theoretical expres-sion
of
Maekawa and Fukuyama. We find that above 50 A this depressionT,
/T,
ois a linear functionof
the sheetof
the perpendicular critical field asafunctionof
tempera-ture, using the relationTA&LE&. Parameters for the two constituent layers ofMo Si&—
„.
41
BRIEF
REPORTS 47411.
0—
TABLE
II.
Values of Rafor bilayers (RD') and multilayers(RpT")with layer thickness d,
.
b' Qmu g +bi Qmu y +bi Qmu
(A)
(o)
(o)
(A)(o)
(o)
(A)(o)
(o)
0.8— 0.6— 343 243 148 33 57 85 6 10 14 122 88 116 160 20 29 61 36 230 480 45 78 I I 10 20 / 0 p' /
i
I I I 50 100 200 d,(A) I I I I 500 1000 2000 5000FIG.1. T,
/T„as
afunction of d, for bilayers andmultilay-ers, calculated with the parameters ofTable
I.
(0)
Measure-ments on multilayers.
(0)
Measurements on bilayers. Dashedand dashed-dotted lines areguides to the eye.
resistance R&,
T,
/T,
p 1—
cRa(Q)/100.
(6)
Here &isamaterial dependent constant and isabout
0.
10 in the caseof
Mo79Gez~. In the caseof
Mos9Si3~ we mea-suredT,
/T,
e as functionof
Ra and find that the results are well described byc
0.
13,
very similar to Mo79Ge2~. A simple wayof
correcting our results on bilayers and multilayers is now to assume that these act assingle enti-ties for the possible effectsof
localization. This assump-tion seems reasonable since the motionof
the electrons is governed by adiffusion constant which isalmost the same forboth constituents. Also, becauseof
the amorphous na-tureof
the layers, extra effectsof
interface scattering are thought to be negligible. In TableII
the valuesof
RD (de-rived from the measured resistance and the known length and widthof
the patterned samples) are given.It
can be seen that also for the thinner multilayers the corrections are not negligible. In Fig. 3 the results are displayed again, but now corrected for localization effects using the inverseof
Eq.(6).
For the correction the valuec
0.
11was used. There isno compelling reason to use the value
of
0.
13found for single filmsof
Mos9Sig~ andc
0.
11was foundto
give the best agreement between measurements and calculations for the bilayers. The bilayer withd,
36 A is left out because its valueof
R& is too high to be well described by Eq.(6).
The correction proves very satisfac-tory, which appears to justify the assumptionof
single-entity behavior. The bilayers now completely follow the calculated behavior. For the multilayers the difference between measurements and calculation below 100A isof the orderof
3%.This may be due tothe slightly low value found for—
d8,
2/dTof
the normal-metal layer. In viewof
the experimental uncertainties it cannot be ascribed to the fact that the Werthamer theory does not well describe the (de Gennes-Cooper) limit d,„0,
"
especially since in the caseof
two superconductors the difference between the Werthamer calculation and the Cooper limit is prob-ably less than in the caseof
a superconducting-normal-metal multilayer such as Nb/Cu."
An estimate for the Cooper limit using N,N„and
a Debye temperature for MoSiof
300 K gives a valueT,
/T„0.
59, only about10%lower than the value from the Werthamer calcula-tion.
In conclusion, we have shown that the change
of
transi-tion temperature as a functionof
layer thickness in the multilayer system Mo&9Si3~/Mo47Si53 can be well de-scribed by the deGennes-Werthamer theory for the prox-imity effect. Bilayersof
the same system are also well de-scribed by the theory, but a correction has to be made for the effectsof
weak localization. These effects appear to affect the bilayers in much the same way as is already known for single thin 61ms.0.1— 1.
0—
I ) l E I o I Xl I— 0.05— 0.8— -0.05— ol
/ 0 I I I 50 100 d,{K) I I 5QQ 1000FIG.2.C&iculated difference (TP'
—
Tm")/T„as afunction of d, using the parameters in TableI. (0)
Measurements. The dashed line isaguide tothe eye.I I I I I I I I I.
'}0 20 50 100 200 500 1000 2000 5000
d,(A)
TJT,
as a function of d, for bilayers andmultilay-ers, calculated with the parameters ofTable
I.
(%,0)
4742
BRIEF
REPORTSACKNOWLEDGMENTS
This work is part
of
the research programof
the "Nederlandse Stichting voor Fundamenteel Onderzoek der Materie(FOM).
"
One ofus(W.
M.)
also wishes tothankF.
O.M.
for financial support during his stay in Leiden. We are grate-ful for stimulating discussions withP. H.
KesandJ.
A.Mydosh.On leave from the Institute ofPhysics, Polish Academy of Sci-ences, Al. Lotnikow 32l46, 02-668Warsawa, Poland.
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