B2
Oxidation and stoichiometry studies of pulsed
laser ablation plasmas
K. Orsel1, H.M.J. Bastiaens1, R. Groenen1, G. Koster1, K.
Beks-Peerenboom2, J. van Dijk2, A.J.H.M. Rijnders1, K.-J. Boller1
1Mesa+, University of Twente, Enschede, The Netherlands 2
Elementary Processes in Gas Discharges, Eindhoven University, Eindhoven, The Netherlands
Pulsed Laser Deposition (PLD) is a versatile technique to deposit complex materials. However, knowledge on the PLD process is based largely on experimental research examining what parameters appear to provide the best result for a specific setup and material. The goal of our research is to progress towards an improved understanding and control of PLD for scaling up to large-area deposition while maintaining full control on film growth, i.e., to the level of atomic precision.
To map the spatial and temporal evolution of the ablation plasma, we built a PLD test system that allows for in-situ laser induced fluorescence imaging and absorption spectroscopy measurements. From this, it is possible to generate a 3D map of the absolute material flux towards the substrate, which is essential for obtaining a fundamental understanding of the plasma chemistry and evolution.
The stoichiometry of the plasma plume, the oxidation of specific species and the propagation speed of the material can all be controlled by varying the ablation laser fluency, the background pressure and the background gas mixture (typically Ar and O2). This in turn allows us to fine-tune the
properties of the layers that are grown with these plasmas. Here, we present our recent results on the oxidation and stoichiometry of species in plasmas created by laser ablation of SrTiO3 and LaAlO3[1].
[1] K. Orsel, H.M.J. Bastiaens, R. Groenen, G. Koster, A.J.H.M. Rijnders, K.-J. Boller, Temporal and spatial mapping of oxidized species in pulsed laser deposition plasmas, Journal of Instrumentation 8, pp. C10021 (2013)
