• No results found

Index of /micas/jcoosema

N/A
N/A
Info
Downloaden
Protected

Academic year: 2021

Share "Index of /micas/jcoosema"

Copied!
12
0
0

Bezig met laden.... (Bekijk nu de volledige tekst)

Download het nu ( 12 pagina )

Hele tekst

(1)

Department of Electrical Engineering (ESAT) MICAS

Displacement

measurement

(2)

Department of Electrical Engineering (ESAT) MICAS

Displacement

measurement

(3)

Department of Electrical Engineering (ESAT) MICAS

Displacement

measurement

Setup: with micrometer:

Hysteresis

up to 20 m!

1.4 V/mm in

most sensitive

part

(4)

Department of Electrical Engineering (ESAT) MICAS

Displacement

measurement

(5)

Department of Electrical Engineering (ESAT) MICAS

Displacement

measurement

Higher precision setup: mounted on mitutoyo:

(6)

Department of Electrical Engineering (ESAT) MICAS

Displacement

measurement

Higher precision setup: mounted on mitutoyo:

(7)

Department of Electrical Engineering (ESAT) MICAS

O-rings: wafer2

(8)

Department of Electrical Engineering (ESAT) MICAS

(9)

Department of Electrical Engineering (ESAT) MICAS

O-rings

FIB pictures:

(10)

Department of Electrical Engineering (ESAT) MICAS

O-rings

(11)

Department of Electrical Engineering (ESAT) MICAS

O-rings

Jenatech pictures: sliced oring

curvature can be an

indication of the etch profile

but: non-perpendicular

(12)

Department of Electrical Engineering (ESAT) MICAS

Orings: wafer2

Diameter measurements: (mitutoyo)

 mask

 Si top

 Si

bottom

underetch top –bottom

994 

1040 

1063 

23 

23 

1016 

1067 

1161 

25 

94 

1073 

1192 

119 

1112 

1241 

129 

1116 

1250 

134 

1120 

1231 

111 

Referenties

Download het nu ( PPT - 12 pagina - 11.49 MB )

GERELATEERDE DOCUMENTEN

Department of Electrical Engineering (ESAT/SCD), University of Leuven, Kasteelpark Arenberg 10, Box 2446, 3001 Leuven, Belgium,

In the second type of representation, a Hilbert space-filling curve is used to visualize a chromosome in a 2D panel at a much higher level of detail using a folded (snake-like)

∗ Stadius Center for Dynamical Systems, Signal Processing and Data Analytics, Department of Electrical Engineering (ESAT) KU Leuven, Belgium

However, jointICA and restricted CMTF distinguish more between the spike and slow wave sources by matching activation in the left temporal lobe and occipital lobe clearly to

Department of Electrical Engineering, ESAT-STADIUS, KU Leuven, Leuven, Belgium. Correspondence to: Joachim Schreurs

Sampling a more diverse subset improves the performance of Nystr¨om approximation and KRR (Fanuel et al., 2020).. In these experiments, we discuss ensemble approaches for the

ESAT , Department of Electrical Engineering , Katholieke Universiteit Leuven Kardinaal Mercierlaan 94 , 3001 Leuven (Heverlee) , Belgium

In this paper, we derive a new algorithm to consistently iden- tify stochastic state space models from given output data without forming the covariance matrix and using

Department of Electrical Engineering - ESAT

Joos Vandewalle, Bart De Moor, Yves Moreau, Marc Moonen, Johan Suykens, Moritz Diehl, Lieven De Lathauwer, Sabine Van Huffel, Jan Engelen.. SISTA - COSIC

Department of Electrical Engineering - ESAT

Joos Vandewalle, Bart De Moor, Yves Moreau, Marc Moonen, Johan Suykens, Moritz Diehl, Lieven De Lathauwer, Sabine Van Huffel, Jan Engelen.. SISTA - COSIC

Department of Electrical Engineering - ESAT

Joos Vandewalle, Bart De Moor, Yves Moreau, Marc Moonen, Johan Suykens, Moritz Diehl, Lieven De Lathauwer, Sabine Van Huffel, Jan Engelen.. SISTA - COSIC

Department of Electrical Engineering - ESAT

Joos Vandewalle, Bart De Moor, Yves Moreau, Marc Moonen, Johan Suykens, Moritz Diehl, Lieven De Lathauwer, Sabine Van Huffel, Jan Engelen.. SISTA - COSIC