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Determination of Strain-Optic effect on Silicon Nitride/Silicon Oxide Waveguides

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Theory

Experimental Setup

Results

Applications

Conclusions

References

Determination of Strain-Optic effect

on Silicon Nitride/Silicon Oxide Waveguides

We investigate the strain-optic effect on Silicon Nitride waveguides. The aim is to use

modeling and experiments to optimize this effect for the implementation of acousto-optic

integrated devices. The deformation generated through a metallic tip will help to

characterize the degree of deformation that is required from PZT.

Intensity profile of fist TE mode.

neff 1.449. Mechanical Strain Profile in Xdirection.

M.A.G. Porcel1, P.J.M van der Slot1, J.P Epping1, Y. Fan1, M. Hoekman2,A. Leinse2,

N. Hoseini1,2, R. Stoffer3, R. Dekkers4, K.-J. Boller1

Wavelength: 1500 to 1600 nm Pressure: 0.5 to 5.5MPa

Wavelength

Experimental Setup. Picture of the system used to apply pressure. 2mm diameter circular tip.

Surfaces Acoustic Wave device with perpendicular interaction.

The SAW is phased 180o between arms to provide tensile

and compressive strain enhancing the effect.

1. Universiteit Twente Laser Physics and Nonlinear Optics, Enschede Netherlands 2. LioniX BV, PO Box 456 7500 AL, Enschede, The Netherlands

3. Phoenix, PO Box 545 7500 AM, Enschede, The Netherlands 4. SolMateS BV, Drienerlolaan 5, building 46 7522 NB Enschede The Netherlands 5. XiO Photonics BV, PO Box 1254, 7500 BG Enschede, The Netherlands

Broadband diode. 1550nm Band

Optical Spectrum Analizer. Max. Resolution 0.01nm

Measured amplitude per frequency response under different pressures are applied to the waveguide.

This experiment lead us to an approximate value of the

effective strain-optic p12 of the waveguide to be 0.5 0.1.

The components of this strain-optic tensor are not yet fully understood. A more accurate and controlled experimental setup will allow more exact calculations of the complete strain-optic tensor. In addition,different waveguide

geometries will take us to a complete characterization not only of the strain-optic tensor of the waveguide but possibly of the thin film silicon nitride.

[1] I. Chang, Acoustooptic devices and applications, IEEE

Transactions on Sonics Ultrasonics 23, 2-22 (1976).

[2] M.M de Lima & P.V. Santos, Modulation of Photonic

Structures by Surfaces Acoustiv waves. Report on Progress

in Physics 68, 1639-1707 (2005).

Spectral response of a Mach-Zender Interferometer with pressure over one arm.

Trans mitted [dB] Pressure [MPa] Wavelenght [nm] Trans mitted P ower [dB] SAW Light

Surfaces Acoustic Waves (SAW) devices have been widely used as optic modulators on crystaline surfaces [1,2].

Calculations have shown that it is possible to use strain-optic

effects on amorphouse glass waveguides systems such as TripleX (not shown here).

Numerical calculations of the characteristics of SAW created by PZT show promising results leading to design of this devices:

Puntual index change for TE due to strain in X and Y

Force

Area

Pressure Force

Area

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