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On the response of charge transfer sensitive levels to the

pulsations of a plasma generator

Citation for published version (APA):

Fey, F. H. A. G., Stoffels, W. W., van der Mullen, J. J. A. M., & Schram, D. C. (1990). On the response of charge

transfer sensitive levels to the pulsations of a plasma generator. In B. Dubreuil (Ed.), ESCAMPIG 90 : 10th

European Sectional Conference on Atomic and Molecular Physics of Ionized Gases, Orleans, France, August

28-31, 1990: Abstracts of invited talks and contributed papers (pp. 304-305). (Europhysics conference abstracts;

Vol. 14E). European Physical Society (EPS).

Document status and date:

Published: 01/01/1990

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On the response of charge transfer sensitive levels to the pulsations of а plasma generator

F.Н.A.G. Fey, W. W. Stoffels, J.A.M. van der Mullen, D.C. Schram

Eindhoven University of Technology, Physics Department, Р.О. Вох 513, 5600 МВ

Eindhoven, The Netherlands

The process of charge transfer can Ье а relevant excitation mechanism in an Inductively Coupled Plasma (ICP), where different species are imbedded in an argon plasma. An example of such а reaction is

where Mgr • refers to the charge transfer sensitive levels in the Mgll system. The relevant levels are shown in figure 1. 20 Ar 15 ';;

~

~ 10 ,,,, ,,,,,,,, uщшшМg'• :L1Dз12.5,---­ :,:P112v~---Hg; зр1s1 ,э,,,o'JJ2 s, Mg; - = = = ,,sш IЗd,Ssl 1 1,01 1<s1 :э2Р112-э,~ 1 k" k,cl :з2 1 Tbls process has been studied before [1] in the

recomblnation zone of а stationary ICP. Another way of investigating the charge transfer is Ьу

measuring the time dependent response of the charge transfer sensitive level to pulsations of the RF-generator. Ву comparing this response to those of other Mg-levels and to those of

Ar,

the

О с:А:::'-'--' _ _ __.:3,:.rJ'_1 ---,'..:.з'..:.Sо;:_ _ _,_,с.._ _ _ М g, Argon Mognesium

importance of the charge transfer reaction can Ье

estimated. In figure 2а Figure 1. Charge transfer between Mg and Ar.

and 2Ь the responses are shown of respectively the Ar(5d) level and the Мg•(Зр) level. The response of Ar(5d) is dominated Ьу the Saha balance and shows а rapid upward jump caused Ьу the cooling of the electrons to the heavy particle temperature when the generator

1390!5 5497 10<429 4123 В9!52 2748

.

.

~ ~ ~ с , о

"

Э ◄76 " 1374 о

T1me (m1crosecond11J ---> T1me {rn1croseconde}

Figure 2. а. Response of Ar(5d), Ь. Response of Мg•(Зр)

(3)

с

,

о u

is switched off and а rapid downward jump due to the heating of the.electrons when the generator is switched on again. In the recomЬination period we see а slow decline. The Mg•(3p) level, dominated Ьу the Boltzmann balance, shows а rapid downward cooling jump at the offset and an rapid upward jump at the onset.

2099В 15748 10499 52!50 100 200 300 T1me (111:icr-asecondsJ 400

The response of Mgr • is totally different to the one of Mg•(3p) which is representative for all other Mg levels that are not affected Ьу charge transfer. At the offset we see ( fig 3.) а slow increase, а

saturation efiect during recomЬination and а small jump upward at the onset.

The absence of а rapid response on cooling indicates that electron ind uced transitions are less

Figure 3. Response of Mgr• important. The slow increase may Ье related to

the fact that recomЬination in the MgI system increases the Mg1 density which pulls the

balance 1 to the left. The rapid response to heating may Ье interpreted as а population of the Mg/ level via the adjacent lower level in the MgII system, Mg•(3p). This level (cf. fig.

2Ь) in its turn is ruled Ьу the Boltzmann balance of electron induced excitation from and deexcitation to the ground state of the MgII system.

These investigations in the program of the Foundation Jor Fundamental Research on Matter {FOM) have been supported Ьу the Netherlands Technology Foundation {STW).

We would like to thank lr. G.A.A. Asselman, CFT Philips Eindhoven for providing us with an ICP equipment. We are especially indebled to Dr. W.F. Knippenberg, Philips Research Laboratories Eindhoven, who enaЫed us to do the pulsation experiments.

[1] J.A.M. van der Mullen, I.J.M.M. Raaijmakers, А.С.А:Р. van Lammeren, D.C. Schram, В. van der Sijde, H.W.J. Schenkelaars, Spectrochim. Acta, 42В, 1039 (1987)

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